Ratis XY(Z) – 3D plane-parallel nano piezo scanning stage

Ratis XY(Z)– 2(3)D piezo scanning stage

Ratis XY(Z) - is basic model of a piezo scanning stage. Ratis XY(Z) piezo stage are capable of moving the objects with sub-nanometer precision.

Piezo stages are made of solid metal part processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. Ratis design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.

Ratis XY(Z) multi-axes scanners are equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.

To control Ratis XY(Z) piezo stages universal controllers EG-3000 or EG-1000 are used as well as NSpec software.

Applications of Ratis XY(Z) include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.

Double Cap Teqnique is used, which greatly improves sensors quality.   


Parameters Ratis XYZ
Ratis XY
XY travel range, µm 200×200 200×200
Z range, µm 20 -
Resonant frequency XY, kHz 1 1
Resonant frequency Z, kHz 30 -
Minimum scan step, nm 0.1 0.1
Angle tilting over the full range, nm < 0.01° < 0.01°
Maximum scanning speed, Hz (line/sec) 10 10
Base sample weight, g 100 100
Operating temperature range at -40°C to 80°C at -40°C to 80°C
Dimensions, mm 100×100×30 100×100×30
Clear aperture diameter, mm 45 45
Material Aluminium Aluminium
*Optional range


Ratis XY(Z) Drawing